Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
文献类型：专利
| 作者 | WANG, PEIDONG; TAYEBATI, PARVIZ; VAKHSHOORI, DARYOOSH |
| 发表日期 | 2004-06-01 |
| 专利号 | US6744805 |
| 著作权人 | NORTEL NETWORKS LIMITED |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers |
| 英文摘要 | A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's. |
| 公开日期 | 2004-06-01 |
| 申请日期 | 2002-09-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45108]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NORTEL NETWORKS LIMITED |
| 推荐引用方式 GB/T 7714 | WANG, PEIDONG,TAYEBATI, PARVIZ,VAKHSHOORI, DARYOOSH. Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers. US6744805. 2004-06-01. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。