Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication
文献类型:专利
作者 | HUANG, RONG-TING; SHIEH, CHAN-LONG; LEBBY, MICHAEL S. |
发表日期 | 2000-08-01 |
专利号 | US6097748 |
著作权人 | SEIKO EPSON CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication |
英文摘要 | A vertical cavity surface emitting laser semiconductor chip including a vertical cavity surface emitting laser (VCSEL) formed on a substrate, a photodetector, integrated with the vertical cavity surface emitting laser for automatic power control (APC) of the vertical cavity surface emitting laser and a driver circuit, integrated with the vertical cavity surface emitting laser and the photodetector. The VCSEL, photodetector and driver circuit are integrated by utilizing a monolithic polysilicon layer. The driver circuit is characterized as a CMOS driver circuit, capable of receiving feedback from the photodetector and adjusting the output power of the vertical cavity surface emitting laser in response to the feedback, thus achieving APC of the VCSEL. |
公开日期 | 2000-08-01 |
申请日期 | 1998-05-18 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/45391] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | SEIKO EPSON CORPORATION |
推荐引用方式 GB/T 7714 | HUANG, RONG-TING,SHIEH, CHAN-LONG,LEBBY, MICHAEL S.. Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication. US6097748. 2000-08-01. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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