Optical tactile sensors
文献类型：专利
| 作者 | VAN STEENBERGE, GEERT; BOSMAN, ERWIN; THIENPONT, HUGO |
| 发表日期 | 2013-10-29 |
| 专利号 | US8567257 |
| 著作权人 | IMEC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical tactile sensors |
| 英文摘要 | A sensor for sensing pressure is disclosed. The sensor may be a pressure sensor for sensing pressure, or a tactile sensor for sensing tactile events through pressure measurement. In one aspect, the sensor includes at least one pressure sensor having at least one VCSEL on a substrate. It further includes a compressible sensor layer covering a top surface of the at least one VCSEL, and a reflecting element covering a top surface of the sensor layer. A method of manufacturing such a sensor is also disclosed. |
| 公开日期 | 2013-10-29 |
| 申请日期 | 2011-12-19 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45423]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | IMEC |
| 推荐引用方式 GB/T 7714 | VAN STEENBERGE, GEERT,BOSMAN, ERWIN,THIENPONT, HUGO. Optical tactile sensors. US8567257. 2013-10-29. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。