Etched-facet ridge lasers with etch-stop
文献类型：专利
| 作者 | BEHFAR, ALEX A.; SCHREMER, ALFRED T.; STAGARESCU, CRISTIAN B. |
| 发表日期 | 2011-08-30 |
| 专利号 | US8009711 |
| 著作权人 | MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Etched-facet ridge lasers with etch-stop |
| 英文摘要 | A photonic device incorporates an epitaxial structure having an active region, and which includes a wet etch stop layer above, but close to, the active region. An etched-facet ridge laser is fabricated on the epitaxial structure by dry etching followed by wet etching. The dry etch is designed to stop before reading the depth needed to form the ridge. The wet etch completes the formation of the ridge and stops at the wet etch stop layer. |
| 公开日期 | 2011-08-30 |
| 申请日期 | 2009-09-25 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45614]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC. |
| 推荐引用方式 GB/T 7714 | BEHFAR, ALEX A.,SCHREMER, ALFRED T.,STAGARESCU, CRISTIAN B.. Etched-facet ridge lasers with etch-stop. US8009711. 2011-08-30. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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