Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
文献类型：专利
| 作者 | SHOUJI, HIROYOSHI; SATO, SHUNICHI; ISHII, TOSHIHIRO; MAKITA, KENGO; HAYASHI, MASAHIRO; SASAKI, TOSHIHIDE; ITOH, AKIHIRO |
| 发表日期 | 2013-04-09 |
| 专利号 | US8416822 |
| 著作权人 | RICOH COMPANY, LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus |
| 英文摘要 | A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body. |
| 公开日期 | 2013-04-09 |
| 申请日期 | 2009-11-12 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45624]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | RICOH COMPANY, LTD. |
| 推荐引用方式 GB/T 7714 | SHOUJI, HIROYOSHI,SATO, SHUNICHI,ISHII, TOSHIHIRO,et al. Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus. US8416822. 2013-04-09. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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