Optical semiconductor device and method of fabricating the same
文献类型：专利
| 作者 | TOHYAMA, MASAKI; HIRAYAMA, YUZO |
| 发表日期 | 1999-03-30 |
| 专利号 | US5889913 |
| 著作权人 | KABUSHIKI KAISHA TOSHIBA |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical semiconductor device and method of fabricating the same |
| 英文摘要 | This invention provides an optical semiconductor device including a semiconductor substrate having a mesa stripe in which at least an optical waveguide layer is formed, a major surface of the semiconductor substrate being a crystal plane, a semiconductor buried layer formed on the two side surfaces of the mesa stripe, and a stripe cladding layer formed on the mesa stripe region and the semiconductor buried layer and having a shape whose section is substantially trapezoidal and whose side surfaces are crystal planes. |
| 公开日期 | 1999-03-30 |
| 申请日期 | 1996-03-13 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45675]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | KABUSHIKI KAISHA TOSHIBA |
| 推荐引用方式 GB/T 7714 | TOHYAMA, MASAKI,HIRAYAMA, YUZO. Optical semiconductor device and method of fabricating the same. US5889913. 1999-03-30. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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