Waveguide optical device and method of fabricating the same
文献类型：专利
| 作者 | KINOSHITA, JUNICHI |
| 发表日期 | 2002-12-24 |
| 专利号 | US6498889 |
| 著作权人 | KABUSHIKI KAISHA TOSHIBA |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Waveguide optical device and method of fabricating the same |
| 英文摘要 | First and second thin-film layers having different compositions are inserted between cladding layers to be stepped, and steps corresponding to a difference between the side etching amounts of these layers are formed. In this manner, symmetrical steps of about 0.5 mum can be reliably and easily formed on the side surfaces of a ridge waveguide. |
| 公开日期 | 2002-12-24 |
| 申请日期 | 2001-03-27 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45785]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | KABUSHIKI KAISHA TOSHIBA |
| 推荐引用方式 GB/T 7714 | KINOSHITA, JUNICHI. Waveguide optical device and method of fabricating the same. US6498889. 2002-12-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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