中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical waveguide utilizing a layered structure

文献类型:专利

作者DUGUAY, MICHEL ALBERT; KOCH, THOMAS LAWSON; KOKUBUN, YASUO; PFEIFFER, LOREN N.
发表日期1990-05-01
专利号CA1268363A
著作权人AMERICAN TELEPHONE AND TELEGRAPH COMPANY
国家加拿大
文献子类授权发明
其他题名Optical waveguide utilizing a layered structure
英文摘要OPTICAL WAVEGUIDE UTILIZING A LAYERED STRUCTURE Abstract A planar silicon dioxide waveguide with low loss for the TE mode has been built on a silicon wafer by separating the waveguide from the substrate with a relatively thin layer of polycrystalline silicon and a layer of silicon dioxide having a combined thickness less than that of the waveguide. The separating layers provide a high antiresonant reflectivity which is operative over a broad range of wavelengths.
公开日期1990-05-01
申请日期1987-01-05
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/45865]  
专题半导体激光器专利数据库
作者单位AMERICAN TELEPHONE AND TELEGRAPH COMPANY
推荐引用方式
GB/T 7714
DUGUAY, MICHEL ALBERT,KOCH, THOMAS LAWSON,KOKUBUN, YASUO,et al. Optical waveguide utilizing a layered structure. CA1268363A. 1990-05-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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