Epitaxial layer capable of exceeding critical thickness
文献类型:专利
作者 | MUKAI, KOKI; SUGAWARA, MITSURU |
发表日期 | 2003-10-28 |
专利号 | US6639254 |
著作权人 | FUJITSU LIMITED |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Epitaxial layer capable of exceeding critical thickness |
英文摘要 | A substrate has a principal surface exposing a first semiconductor material. A micro structure is disposed on the principal surface of the substrate. The micro structure is made of a second semiconductor material having a lattice constant different from a lattice constant of the first semiconductor material, and defines a three-dimensionally irregular upper surface. A strained layer is disposed on the micro structure. The strained layer is made of a third semiconductor material having a lattice constant different from a lattice constant of the first semiconductor material. A semiconductor device is provided which has the structure allowing to form a high quality strained layer in terms of crystallography. |
公开日期 | 2003-10-28 |
申请日期 | 2001-01-09 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/45905] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FUJITSU LIMITED |
推荐引用方式 GB/T 7714 | MUKAI, KOKI,SUGAWARA, MITSURU. Epitaxial layer capable of exceeding critical thickness. US6639254. 2003-10-28. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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