Distributed feedback laser device and method for manufacturing the same
文献类型：专利
| 作者 | TAKIGUCHI, TOHRU; HANAMAKI, YOSHIHIKO |
| 发表日期 | 2004-01-06 |
| 专利号 | US6674784 |
| 著作权人 | MITSUBISHI DENKI KABUSHIKI KAISHA |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Distributed feedback laser device and method for manufacturing the same |
| 英文摘要 | A distributed feedback laser device includes a semiconductor base having a ridge waveguide structure projecting from its principal plane. The ridge waveguide structure extends with a predetermined width from one edge of the semiconductor base to an opposite edge. A diffraction grating layer is confined within the ridge structure. The ridge waveguide structure is formed by etching using an SiO2 film and a resist film as masks so that the diffraction grating layer is produced with substantially the same width as, or a less width than, the width of the ridge waveguide structure. A lambda/4 shift diffraction grating or a chirped diffraction grating is preferably employed. |
| 公开日期 | 2004-01-06 |
| 申请日期 | 2001-05-22 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45934]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MITSUBISHI DENKI KABUSHIKI KAISHA |
| 推荐引用方式 GB/T 7714 | TAKIGUCHI, TOHRU,HANAMAKI, YOSHIHIKO. Distributed feedback laser device and method for manufacturing the same. US6674784. 2004-01-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。