中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor optical device and a method of fabricating the same

文献类型:专利

作者IGA, RYUZO; KONDO, YASUHIRO
发表日期2010-04-20
专利号US7701993
著作权人NIPPON TELEGRAPH AND TELEPHONE CORPORATION
国家美国
文献子类授权发明
其他题名Semiconductor optical device and a method of fabricating the same
英文摘要In order to provide excellent device characteristics and enhance fabrication yield and run-to-run reproducibility in a buried device structure using a low mesa on a p-type substrate, a cross sectional configuration before growth of a contact layer of a device, i.e., after growth of an over-cladding layer is flattened so as not to cause a problem in crystal quality of the contact layer. A mesa-stripe stacked body including at least a p-type cladding layer (2), an active layer (4) and an n-type cladding layer (6) is formed on a p-type semiconductor substrate (1), a current-blocking layer (8) is buried in both sides of the stacked body, and an n-type over-cladding layer (9) and an n-type contact layer (10) are disposed on the current-blocking layer (8) and the stacked body. The n-type over-cladding layer (9) is made of a semiconductor crystal having a property for flattening a concavo-convex shape of upper surfaces of the current-blocking layer (8) and the stacked body.
公开日期2010-04-20
申请日期2005-05-26
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/46009]  
专题半导体激光器专利数据库
作者单位NIPPON TELEGRAPH AND TELEPHONE CORPORATION
推荐引用方式
GB/T 7714
IGA, RYUZO,KONDO, YASUHIRO. Semiconductor optical device and a method of fabricating the same. US7701993. 2010-04-20.

入库方式: OAI收割

来源:西安光学精密机械研究所

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