Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
文献类型：专利
| 作者 | IDLER, WILFRIED |
| 发表日期 | 1993-10-12 |
| 专利号 | US5252497 |
| 著作权人 | ALCATEL N.V. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation |
| 英文摘要 | In the commonly used methods for the coating of opto-electronic components, especially of semiconductor lasers, the layer thickness of a layer that is to be deposited is measured optically. The optical signal is converted into an electrical one with which the coating is controlled. The invention relates to the purely electrical interpretation of the high frequency component of the electrical noise power of an opto-electronic component (3) when a direct current passes through it. From the noise power, a controlling computer (10) derives a signal for control of the layer thickness; this is fed into a coating apparatus (14) of a coating reactor (2) which has a reacting chamber (1) containing the component (3) to be coated. |
| 公开日期 | 1993-10-12 |
| 申请日期 | 1991-08-01 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46058]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ALCATEL N.V. |
| 推荐引用方式 GB/T 7714 | IDLER, WILFRIED. Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation. US5252497. 1993-10-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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