Method for manufacturing of integrated DFB laser with coupled strip waveguide on a substrate
文献类型：专利
| 作者 | AMANN, MARKUS-CHRISTIAN; MAHLEIN, HANS F.; STEGMUELLER, BERNHARD; THULKE, WOLFGANG; WINZER, GERHARD; WOLFF, ULRICH |
| 发表日期 | 1987-04-07 |
| 专利号 | US4656636 |
| 著作权人 | SIEMENS AKTIENGESELLSCHAFT |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for manufacturing of integrated DFB laser with coupled strip waveguide on a substrate |
| 英文摘要 | A method for integrating a DFB laser and a passive strip waveguide on a substrate. A layer stack is produced in a first epitaxy step, the layer stack having a laser-active layer and a surface-wide grating on the uppermost layer, and eroding the stack area-wise, but only down to a layer under the laser-active layer, not down to the substrate, by means of etching to create a step separating the laser region from the passive strip waveguide region. By employing an etching stop layer, the etching can ensue self-adjustingly, and the coupling between the laser-active layer and the passive strip waveguide region occurs not by end coupling, but by surface coupling. Only two epitaxy steps are required for the complete manufacture of the structure, and a strip required for the definition of the laser and of the waveguide can be produced in the same single method step. |
| 公开日期 | 1987-04-07 |
| 申请日期 | 1985-12-23 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46117]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SIEMENS AKTIENGESELLSCHAFT |
| 推荐引用方式 GB/T 7714 | AMANN, MARKUS-CHRISTIAN,MAHLEIN, HANS F.,STEGMUELLER, BERNHARD,et al. Method for manufacturing of integrated DFB laser with coupled strip waveguide on a substrate. US4656636. 1987-04-07. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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