Tapered beam expander waveguide integrated with a diode lasesr
文献类型：专利
| 作者 | BEN-MICHAEL, RAFAEL; KOREN, UZIEL |
| 发表日期 | 1998-02-24 |
| 专利号 | US5720893 |
| 著作权人 | LUCENT TECHNOLOGIES INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Tapered beam expander waveguide integrated with a diode lasesr |
| 英文摘要 | The present invention is directed to a semiconductor waveguiding structure which includes a) a first semiconductor waveguiding layer formed on a substrate, b) a barrier layer that is formed on the first semiconductor waveguiding layer, and that is resistant to a selected etchant, and c) a second semiconductor waveguiding layer that is etched using the selected etchant such that its width is tapered along its length to a pointed edge. A separate etching of the first semiconductor layer is performed to form each sidewall of the first semiconductor layer. The intersection of those sidewalls defines the pointed edge which has a radius of curvature of less than 500 Angstroms. |
| 公开日期 | 1998-02-24 |
| 申请日期 | 1996-05-01 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46201]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LUCENT TECHNOLOGIES INC. |
| 推荐引用方式 GB/T 7714 | BEN-MICHAEL, RAFAEL,KOREN, UZIEL. Tapered beam expander waveguide integrated with a diode lasesr. US5720893. 1998-02-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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