Optical waveguide structure including reflective asymmetric cavity
文献类型：专利
| 作者 | BLONDER, GREG E.; CAPPUZZO, MARK A.; CLARK, HAROLD R.; SCOTTI, RONALD E.; WONG, YIU-HUEN |
| 发表日期 | 1993-01-26 |
| 专利号 | US5182787 |
| 著作权人 | AT&T BELL LABORATORIES |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical waveguide structure including reflective asymmetric cavity |
| 英文摘要 | A turning mirror in an optical waveguide structure is made by etching in the upper surface of the structure a cavity (18) that intercepts the path of light propagated by the waveguide (15, 16, 13). Preferably, the cavity is made to be asymmetric with the side (25) of the cavity remote from the waveguide sloping at typically a forty-five degree angle. The asymmetry can be introduced by using mask and etch techniques and treating the surface of the structure such that the etchant undercuts the mask on the side of the cavity remote from the waveguide to a greater extent than it undercuts the mask on the side of the cavity adjacent the waveguide. |
| 公开日期 | 1993-01-26 |
| 申请日期 | 1992-03-05 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46238]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AT&T BELL LABORATORIES |
| 推荐引用方式 GB/T 7714 | BLONDER, GREG E.,CAPPUZZO, MARK A.,CLARK, HAROLD R.,et al. Optical waveguide structure including reflective asymmetric cavity. US5182787. 1993-01-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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