Methods for forming index guided vertical cavity surface emitting lasers
文献类型：专利
| 作者 | LEE, HSING-CHUNG; CHUI, LIEW-CHUANG |
| 发表日期 | 2005-02-08 |
| 专利号 | US6852558 |
| 著作权人 | LUMENTUM OPERATIONS LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Methods for forming index guided vertical cavity surface emitting lasers |
| 英文摘要 | Planar index guided vertical cavity surface emitting laser (PIG VCSEL) utilizes index guiding to provide improved optical confinement and proton implantation to improve current confinement. Index guiding is achieved by etching index guide openings (holes or partial ridges) around the optical confinement region and may be adjusted by varying the etched volume of the index guide openings (holes and partial ridges). The top contact surface area is increased in the PIG VCSEL thereby lowering contact and device resistance to improve VCSEL performance further. The PIG VCSEL is a substantially planarized device for ease of manufacture. |
| 公开日期 | 2005-02-08 |
| 申请日期 | 2003-01-07 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46464]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LUMENTUM OPERATIONS LLC |
| 推荐引用方式 GB/T 7714 | LEE, HSING-CHUNG,CHUI, LIEW-CHUANG. Methods for forming index guided vertical cavity surface emitting lasers. US6852558. 2005-02-08. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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