Annular waveguide vertical cavity surface emitting laser array and method of fabrication
文献类型：专利
| 作者 | CLAISSE, PAUL R.; KIELY, PHILIP A.; RAMDANI, JAMAL; JIANG, WENBIN |
| 发表日期 | 2000-07-04 |
| 专利号 | US6084900 |
| 著作权人 | SEIKO EPSON CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Annular waveguide vertical cavity surface emitting laser array and method of fabrication |
| 英文摘要 | An array of annular waveguide VCSELs for achieving a stable single high order mode light source characterized as emitting a plurality of emission beams of varying wavelengths. The device array including a first mirror stack with mirror pairs in a AlxGa1-xAs/AlyGa1-yAs material system lattice matched to an active region. The active region includes an active structure sandwiched between a first cladding region adjacent the first mirror stack and a second cladding region, the active structure having at least one quantum well. The VCSEL further includes a second mirror stack lattice matched to the second cladding region and having mirror pairs in a AlxGa1-xAs/AlyGa1-yAs material system. The second mirror stack is etched to define a first VCSEL and at least one additional VCSEL, each VCSEL including an etched region, thereby defining an annular emission region through which light generated by the annular waveguide VCSEL is emitted. |
| 公开日期 | 2000-07-04 |
| 申请日期 | 1997-12-24 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46760]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SEIKO EPSON CORPORATION |
| 推荐引用方式 GB/T 7714 | CLAISSE, PAUL R.,KIELY, PHILIP A.,RAMDANI, JAMAL,et al. Annular waveguide vertical cavity surface emitting laser array and method of fabrication. US6084900. 2000-07-04. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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