Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
文献类型：专利
| 作者 | YUEN, WUPEN; CHANG-HASNAIN, CONSTANCE J.; LI, GABRIEL S. |
| 发表日期 | 2001-01-16 |
| 专利号 | US6174749 |
| 著作权人 | THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays |
| 英文摘要 | The present invention provides multiple-wavelength vertical-cavity surface-emitting laser ("MW-VCSEL") arrays. These arrays are fabricated in a molecular beam epitaxy system or the like using two patterned-substrate growth techniques. The growth techniques can be used with an in-situ laser reflectometry. In one embodiment, a temperature dependent growth rate to create the devices is provided. In an alternative aspect, uniform growth is performed followed by a temperature-dependent desorption technique. These techniques provided desired wavelength span and desired characteristics. |
| 公开日期 | 2001-01-16 |
| 申请日期 | 1998-05-13 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/46833]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
| 推荐引用方式 GB/T 7714 | YUEN, WUPEN,CHANG-HASNAIN, CONSTANCE J.,LI, GABRIEL S.. Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays. US6174749. 2001-01-16. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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