Laser manufacture
文献类型：专利
| 作者 | RICHARD GORDON SAMUEL PLUMB |
| 发表日期 | 1989-05-24 |
| 专利号 | GB2175442B |
| 著作权人 | STC PLC |
| 国家 | 英国 |
| 文献子类 | 授权发明 |
| 其他题名 | Laser manufacture |
| 英文摘要 | A ridge waveguide laser structure is manufactured by a method including providing a photoresist stripe (8) on an exposed area of a p cap layer (4) of a multilayer laser wafer; etching channels (9) through the cap layer (4) and a p passive layer (3) using the stripe (8) and an oxide layer window (FIG. 4) as a mask; evaporating a passivating and insulating oxide (11, 11a) over the wafer, there being breaks (C) in the oxide where the stripe (8) is undercut during channel etching; and removing the stripe (8) and the oxide (11a) on it by a lift-off technique. |
| 公开日期 | 1989-05-24 |
| 申请日期 | 1985-05-15 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/47503]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | STC PLC |
| 推荐引用方式 GB/T 7714 | RICHARD GORDON SAMUEL PLUMB. Laser manufacture. GB2175442B. 1989-05-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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