中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks

文献类型:专利

作者MAUREL, PHILIPPE; GARCIA, JEAN-CHARLES; HIRTZ, JEAN-PIERRE
发表日期1997-05-06
专利号US5627100
著作权人THOMSON-CSF
国家美国
文献子类授权发明
其他题名Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks
英文摘要A method for making a set of surface-emitting laser diodes comprises the making of reflectors by the epitaxial growth of at least one semiconductor material through a mask having apertures with inclined flanks. This method leads to the obtaining of the Bragg reflectors obtained in situ, removing the need for the ion etching of a semiconductor substrate followed by a phase for the conditioning of the surface of the sample before the preparation of the desired laser structure. Application: optical power source.
公开日期1997-05-06
申请日期1995-09-07
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/47740]  
专题半导体激光器专利数据库
作者单位THOMSON-CSF
推荐引用方式
GB/T 7714
MAUREL, PHILIPPE,GARCIA, JEAN-CHARLES,HIRTZ, JEAN-PIERRE. Method for the making of surface-emitting laser diodes with mechanical mask, the apertures having inclined flanks. US5627100. 1997-05-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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