Protection means for ridge waveguide laser structures using thick organic films
文献类型：专利
| 作者 | JOST, MARK E.; KWONG, RANEE W.; BEHFAR-RAD, ABBAS; KWAN, PETER P. |
| 发表日期 | 1994-04-26 |
| 专利号 | US5307357 |
| 著作权人 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Protection means for ridge waveguide laser structures using thick organic films |
| 英文摘要 | What is disclosed is a semiconductor ridge waveguide laser structure having mechanical protection of ridge element by means of a thick, multi-layer organic material. The organic material, which may be a polyimide film, is deposited over the ridge element. The present invention also provides a fabrication process for depositing the protective means on the ridge element including deposition and photolithographic steps. |
| 公开日期 | 1994-04-26 |
| 申请日期 | 1992-11-05 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/47750]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 推荐引用方式 GB/T 7714 | JOST, MARK E.,KWONG, RANEE W.,BEHFAR-RAD, ABBAS,et al. Protection means for ridge waveguide laser structures using thick organic films. US5307357. 1994-04-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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