Microlens frames for laser diode arrays
文献类型：专利
| 作者 | SKIDMORE, JAY A.; FREITAS, BARRY L. |
| 发表日期 | 1999-07-13 |
| 专利号 | US5923481 |
| 著作权人 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Microlens frames for laser diode arrays |
| 英文摘要 | Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter. |
| 公开日期 | 1999-07-13 |
| 申请日期 | 1996-11-27 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/47817]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LAWRENCE LIVERMORE NATIONAL SECURITY LLC |
| 推荐引用方式 GB/T 7714 | SKIDMORE, JAY A.,FREITAS, BARRY L.. Microlens frames for laser diode arrays. US5923481. 1999-07-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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