Annular waveguide vertical cavity surface emitting laser and method of fabrication
文献类型:专利
作者 | CLAISSE, PAUL; JIANG, WENBIN; KIELY, PHILIP |
发表日期 | 1999-10-05 |
专利号 | US5963576 |
著作权人 | MOTOROLA, INC. |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Annular waveguide vertical cavity surface emitting laser and method of fabrication |
英文摘要 | An annular waveguide VCSEL for achieving a stable high power single high order mode output including a first mirror stack with mirror pairs in a AlxGa1-xAs/AlyGa1-yAs material system lattice matched to an active region. The active region includes an active structure sandwiched between a first cladding region adjacent the first mirror stack and a second cladding region, the active structure having at least one quantum well. The VCSEL further includes a second mirror stack lattice matched to the second cladding region and having mirror pairs in a AlxGa1-xAs/AlyGa1-yAs material system. The second mirror stack including an etched region, thereby defining an annular emission region through which light generated by the annular waveguide VCSEL is emitted. |
公开日期 | 1999-10-05 |
申请日期 | 1997-08-04 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/48351] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | MOTOROLA, INC. |
推荐引用方式 GB/T 7714 | CLAISSE, PAUL,JIANG, WENBIN,KIELY, PHILIP. Annular waveguide vertical cavity surface emitting laser and method of fabrication. US5963576. 1999-10-05. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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