Electrically pumped long-wavelength VCSEL with air gap DBR and methods of fabrication
文献类型：专利
| 作者 | SHIEH, CHAN-LONG; TSAO, JEFF |
| 发表日期 | 2004-02-24 |
| 专利号 | US6696308 |
| 著作权人 | JDS UNIPHASE CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Electrically pumped long-wavelength VCSEL with air gap DBR and methods of fabrication |
| 英文摘要 | A method of fabricating an electrically pumped, long-wavelength vertical cavity surface emitting laser includes epitaxially growing a stack of alternate layers of a first material and a second material on a compatible substrate. A long wave-length active region is epitaxially grown on the stack and a lasing aperture and current confinement volume are defined in the long wave-length active region. A first mirror stack is formed on the long wave-length active region and portions of one of the first material and the second material are removed to form a high reflectivity second mirror stack. |
| 公开日期 | 2004-02-24 |
| 申请日期 | 2000-10-27 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48388]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | JDS UNIPHASE CORPORATION |
| 推荐引用方式 GB/T 7714 | SHIEH, CHAN-LONG,TSAO, JEFF. Electrically pumped long-wavelength VCSEL with air gap DBR and methods of fabrication. US6696308. 2004-02-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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