Scanning III-V compound light emitters integrated with Si-based actuators
文献类型：专利
| 作者 | SUN, DECAI; BRINGANS, ROSS D.; CHUA, CHRISTOPHER L.; FLOYD, PHILIP D.; PEETERS, ERIC; KUBBY, JOEL A.; TRAN, ALEX T. |
| 发表日期 | 2003-05-20 |
| 专利号 | US6567448 |
| 著作权人 | XEROX CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Scanning III-V compound light emitters integrated with Si-based actuators |
| 英文摘要 | A III-V compound light emitter is integrated with Si-based actuators. The proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser. Electro or magnetic based actuation from Si-based actuators provides |
| 公开日期 | 2003-05-20 |
| 申请日期 | 1998-12-11 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48459]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | XEROX CORPORATION |
| 推荐引用方式 GB/T 7714 | SUN, DECAI,BRINGANS, ROSS D.,CHUA, CHRISTOPHER L.,et al. Scanning III-V compound light emitters integrated with Si-based actuators. US6567448. 2003-05-20. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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