Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors
文献类型：专利
| 作者 | BERLIN, ANDREW A.; HUNG, ELMER S. |
| 发表日期 | 2003-04-22 |
| 专利号 | US6552328 |
| 著作权人 | XEROX CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors |
| 英文摘要 | A microsensor including a VCSEL for use in a MEMS. By coupling the top mirror of the VCSEL to the micromechanical structure, either directly or indirectly, the motion of the micromechanical structure in response to a physical phenomenon can directly modulate the wavelength of the light emitted from the VCSEL. Also, a method for sensing and transmitting information about the configuration or motion of a mechanical structure. The method includes coupling the top mirror of a VCSEL to the mechanical structure that directly encodes information about the motion into the frequency of light emitted by the VCSEL. |
| 公开日期 | 2003-04-22 |
| 申请日期 | 2000-02-22 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48490]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | XEROX CORPORATION |
| 推荐引用方式 GB/T 7714 | BERLIN, ANDREW A.,HUNG, ELMER S.. Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors. US6552328. 2003-04-22. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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