Method of fabricating oxide-aperture vertical cavity surface emitting lasers
文献类型：专利
| 作者 | GOOSSEN, KEITH WAYNE; NUSS, MARTIN C. |
| 发表日期 | 2000-12-12 |
| 专利号 | US6159760 |
| 著作权人 | LUCENT TECHNOLOGIES INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of fabricating oxide-aperture vertical cavity surface emitting lasers |
| 英文摘要 | A method of fabricating oxide-apertured vertical cavity surface emitting lasers involving the steps of: i) defining, during the fabrication of one or more VCSELs on an electronic chip, a number of mesa structures of different sizes; ii) selectively oxidizing the chip and mesa structures to produce an oxide-aperture for each structure; iii) inspecting the chip to determine which one of the mesas is desired or optimal; iv) choosing an appropriate metalization mask that serves to metalize and electrically connect only that desired mesa structure; and v) depositing, a dielectric top mirror on that electrically connected mesa. Advantageously, the method may be practiced using a variety of fabrication techniques and apparatus that are compatible with conventional devices. A distinguishing characteristic of our inventive method, is that only a desired or optimal mesa is completed while the remaining mesas on a particular chip remain unprocessed. |
| 公开日期 | 2000-12-12 |
| 申请日期 | 1999-04-29 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48576]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | LUCENT TECHNOLOGIES INC. |
| 推荐引用方式 GB/T 7714 | GOOSSEN, KEITH WAYNE,NUSS, MARTIN C.. Method of fabricating oxide-aperture vertical cavity surface emitting lasers. US6159760. 2000-12-12. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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