VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication
文献类型：专利
| 作者 | LEBBY, MICHAEL S.; SHIEH, CHAN-LONG; ACKLEY, DONALD E. |
| 发表日期 | 1994-09-27 |
| 专利号 | US5351257 |
| 著作权人 | FINISAR CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication |
| 英文摘要 | A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed. |
| 公开日期 | 1994-09-27 |
| 申请日期 | 1993-03-08 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48745]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FINISAR CORPORATION |
| 推荐引用方式 GB/T 7714 | LEBBY, MICHAEL S.,SHIEH, CHAN-LONG,ACKLEY, DONALD E.. VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication. US5351257. 1994-09-27. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。