Monolithic multiple wavelength VCSEL array
文献类型：专利
| 作者 | LEMOFF, BRIAN E.; BABIC, DUBRAVKO; SCHNEIDER, RICHARD P. |
| 发表日期 | 2001-07-10 |
| 专利号 | US6259121 |
| 著作权人 | AGILENT TECHNOLOGIES, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Monolithic multiple wavelength VCSEL array |
| 英文摘要 | An array of n-wavelength vertical cavity surface emitting lasers (VCSELs) can be grown with precise and repeatable wavelength control. First, a foundation VCSEL structure is grown on a substrate. Next, n-paired layers of AlGaAs and InGaP are grown, where n is the desired number of different wavelengths. Next, one of the n regions is masked and etched. The steps of masking and etching are repeated until all n regions are etched. Finally, the upper VCSEL structure is grown. |
| 公开日期 | 2001-07-10 |
| 申请日期 | 1999-09-16 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48793]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AGILENT TECHNOLOGIES, INC. |
| 推荐引用方式 GB/T 7714 | LEMOFF, BRIAN E.,BABIC, DUBRAVKO,SCHNEIDER, RICHARD P.. Monolithic multiple wavelength VCSEL array. US6259121. 2001-07-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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