Vertical cavity surface emitting laser with composite reflectors
文献类型:专利
作者 | CHEN, YAOCHUNG; GAMBIN, VINCENT; ZENG, XIANGLIN |
发表日期 | 2017-08-15 |
专利号 | US9735545 |
著作权人 | NORTHROP GRUMMAN SYSTEMS CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting laser with composite reflectors |
英文摘要 | A vertical cavity surface emitting laser (VCSEL) including a substrate and a bottom distributed Bragg reflector (DBR) having a plurality of layers deposited on the substrate. The VCSEL also includes a first charge confining layer deposited on the bottom DBR, an active region deposited on the first charge confining layer, and a second charge confining layer deposited on the active region. A current blocking layer is provided on the second charge confining layer, and a top epitaxial DBR including a plurality of top epitaxial DBR layers is deposited on the current blocking layer. A top electrode is deposited on the top epitaxial DBR, a bottom electrode is deposited on the bottom DBR and adjacent to the active region, and a top dielectric DBR is deposited on the top epitaxial DBR and the top electrode. |
公开日期 | 2017-08-15 |
申请日期 | 2016-07-08 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/48866] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NORTHROP GRUMMAN SYSTEMS CORPORATION |
推荐引用方式 GB/T 7714 | CHEN, YAOCHUNG,GAMBIN, VINCENT,ZENG, XIANGLIN. Vertical cavity surface emitting laser with composite reflectors. US9735545. 2017-08-15. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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