Vertical cavity surface emitting laser and method for manufacturing the same
文献类型：专利
| 作者 | MAEDA, OSAMU; SHIOZAKI, MASAKI; YAMAGUCHI, NORIHIKO; YAMAUCHI, YOSHINORI; ARAKIDA, TAKAHIRO |
| 发表日期 | 2010-03-09 |
| 专利号 | US7675956 |
| 著作权人 | SONY CORPORATION |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Vertical cavity surface emitting laser and method for manufacturing the same |
| 英文摘要 | A Vertical Cavity Surface Emitting Laser capable of being easily and inexpensively manufactured and stabilizing the polarization direction of laser light in one direction is provided. The VCSEL includes a semiconductor lamination structure including a first multilayer film reflector, an active layer having a light emitting region, and a second multilayer film reflectors, in this order over a substrate from the substrate side. The semiconductor lamination structure has a pair of grooves provided with a region opposed to the light emitting region in between, and one or a plurality of first oxidation layers including a first non-oxidation region provided at least in a region opposed to the light emitting region and a first oxidation region provided on each side face of the pair of grooves. |
| 公开日期 | 2010-03-09 |
| 申请日期 | 2008-03-24 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/48994]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SONY CORPORATION |
| 推荐引用方式 GB/T 7714 | MAEDA, OSAMU,SHIOZAKI, MASAKI,YAMAGUCHI, NORIHIKO,et al. Vertical cavity surface emitting laser and method for manufacturing the same. US7675956. 2010-03-09. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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