Method for aperturing vertical-cavity surface-emitting lasers (VCSELs)
文献类型：专利
| 作者 | COLDREN, LARRY A.; HALL, ERIC M.; NAKAGAWA, SHIGERU; ALMUNEAU, GUILHEM |
| 发表日期 | 2005-01-11 |
| 专利号 | US6841407 |
| 著作权人 | REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for aperturing vertical-cavity surface-emitting lasers (VCSELs) |
| 英文摘要 | A method for aperturing a vertical-cavity surface-emitting laser (VCSEL), for increasing the external quantum efficiency and decreasing the threshold current, involves an etching mixture that is applied to the active region of the VCSEL. The etching mixture is designed in a manner to selectively etch the active region of the VCSEL at a rate substantially faster than the etch rate of at least one of the multiple DBRS associated with the VCSEL. |
| 公开日期 | 2005-01-11 |
| 申请日期 | 2001-08-21 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/49101]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE |
| 推荐引用方式 GB/T 7714 | COLDREN, LARRY A.,HALL, ERIC M.,NAKAGAWA, SHIGERU,et al. Method for aperturing vertical-cavity surface-emitting lasers (VCSELs). US6841407. 2005-01-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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