中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Closely-spaced VCSEL and photodetector for applications requiring their independent operation

文献类型:专利

作者SWIRHUN, STANLEY E.; SCOTT, JEFFREY W.
发表日期2004-12-28
专利号US6835992
著作权人OPTICAL COMMUNICATION PRODUCTS, INC.
国家美国
文献子类授权发明
其他题名Closely-spaced VCSEL and photodetector for applications requiring their independent operation
英文摘要A monolthically integrated VCSEL and photodetector, and a method of manufacturing same, are disclosed for applications where the VCSEL and photodetector require separate operation such as duplex serial data communications applications. A first embodiment integrates a VCSEL with an MSM photodetector on a semi-insulating substrate. A second embodiment builds the layers of a p-i-n photodiode on top of layers forming a VCSEL using a standard VCSEL process. The p-i-n layers are etched away in areas where VCSELs are to be formed and left where the photodetectors are to be formed. The VCSELs underlying the photodetectors are inoperable, and serve to recirculate photons back into the photodetector not initially absorbed. The transmit and receive pairs are packaged in a single package for interface to multifiber ferrules. The distance between the devices is precisely defined photolithographically, thereby making alignment easier.
公开日期2004-12-28
申请日期2000-01-18
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/49729]  
专题半导体激光器专利数据库
作者单位OPTICAL COMMUNICATION PRODUCTS, INC.
推荐引用方式
GB/T 7714
SWIRHUN, STANLEY E.,SCOTT, JEFFREY W.. Closely-spaced VCSEL and photodetector for applications requiring their independent operation. US6835992. 2004-12-28.

入库方式: OAI收割

来源:西安光学精密机械研究所

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