Guides lithographically fabricated on semiconductor devices
文献类型：专利
| 作者 | COHEN, MITCHELL S.; CORDES, MICHAEL J.; CORDES, STEVEN A.; HOGAN, WILLIAM K.; JOHNSON, GLEN W.; KUCHTA, DANIEL M.; LACEY, DIANNE L.; SPEIDELL, JAMES L.; TREWHELLA, JEANNINE M.; ZINTER, JOSEPH P. |
| 发表日期 | 2004-09-28 |
| 专利号 | US6798953 |
| 著作权人 | GLOBALFOUNDRIES INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Guides lithographically fabricated on semiconductor devices |
| 英文摘要 | A structure that includes a substrate, typically a semiconductor chip such as a VCSEL or photodetector chip, and a guide for aligning a signal conveying device, typically an optical fiber, to a transducer such as an optoelectronic device on the semiconductor chip. The guide is formed, in a preferred embodiment, by lithographically exposing and developing a thick layer of photoresist. The structure is assembled by placing and securing the signal conveying device into a cavity-like region of the guide. |
| 公开日期 | 2004-09-28 |
| 申请日期 | 2000-01-07 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/50474]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | GLOBALFOUNDRIES INC. |
| 推荐引用方式 GB/T 7714 | COHEN, MITCHELL S.,CORDES, MICHAEL J.,CORDES, STEVEN A.,et al. Guides lithographically fabricated on semiconductor devices. US6798953. 2004-09-28. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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