Optical semiconductor device and its manufacture
文献类型：专利
| 作者 | HAMADA TAKESHI |
| 发表日期 | 1992-05-13 |
| 专利号 | JP1992139628A |
| 著作权人 | MATSUSHITA ELECTRON CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical semiconductor device and its manufacture |
| 英文摘要 | PURPOSE:To obtain a device in which the precision of the relative positional relation of components is high by forming all of the relative positional relation of the semiconductor laser chip, the detector for detecting a signal, and the hologram of the components on a silicon substrate by using the technique of photolithography. CONSTITUTION:Light emitted from the semiconductor laser chip 1 is reflected by a V-grooved reflector mirror 6, and is emitted upward. The emitted light is collected on a disk 3 by a lens 2, and the reflected light from this desk 3 is diffracted by the hologram 8, and is collected to a photodetector 9. Through this configuration, the relative positional relation of the V-grooved reflector mirror 6, the bonding position of the semiconductor laser chip 1, the photodetector 9, and the hologram 8 can be controlled in a 1mum unit by using the technique of the photolithography, and the device in which the precision of the relational position relation of the components is high can be realized. |
| 公开日期 | 1992-05-13 |
| 申请日期 | 1990-09-28 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/50649]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MATSUSHITA ELECTRON CORP |
| 推荐引用方式 GB/T 7714 | HAMADA TAKESHI. Optical semiconductor device and its manufacture. JP1992139628A. 1992-05-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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