Opto-electronic devices with multiple oxide apertures
文献类型:专利
作者 | SUN, DECAI; CHANG-HASNAIN, CONSTANCE; JANSEN, MITCH |
发表日期 | 2001-11-22 |
专利号 | US20010043629A1 |
著作权人 | SUN DECAI |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Opto-electronic devices with multiple oxide apertures |
英文摘要 | A vertical cavity apparatus includes a die with a top surface and a plurality of planar electrically conducting layers. At least one of the layers is an oxide layer formed of an oxidizable material that is oxidized upon exposure to an oxidizing agent to convert the oxidizable material to an electrical insulator. A plurality of oxide apertures are formed by via holes connecting the top surface to the oxide layer. A majority of the individual oxide apertures have different sizes. An optoelectronic device is coupled to a single oxide aperture in the die. |
公开日期 | 2001-11-22 |
申请日期 | 2001-03-05 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/51303] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | SUN DECAI |
推荐引用方式 GB/T 7714 | SUN, DECAI,CHANG-HASNAIN, CONSTANCE,JANSEN, MITCH. Opto-electronic devices with multiple oxide apertures. US20010043629A1. 2001-11-22. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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