The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film
文献类型：期刊论文
| 作者 | Hu M(胡明)1,2 ; Gao XM(高晓明)1; Sun JY(孙嘉奕)1; Weng LJ(翁立军)1; Zhou F(周峰)1; Liu WM(刘维民)1; Liu WM(刘维民)
|
| 刊名 | Applied Surface Science
 |
| 出版日期 | 2012 |
| 卷号 | 258期号:15页码:5683-5688 |
| 关键词 | Atomic oxygen resistance Tribological properties Ag film Amorphous Si and SiNx protective film |
| ISSN号 | 0169-4332 |
| 通讯作者 | 刘维民 |
| 英文摘要 | The Ag film, and double layer films of Ag/Si and Ag/SiNx were deposited by magnetron sputtering technique. The atomic oxygen (AO) irradiation tests were conducted using a ground AO simulation facility. The microstructure and composition of these films before and after AO irradiation tests were analyzed using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), respectively, atomic force microscope (AFM) and scanning electron microscopy (SEM), respectively. Then the protective effects of nanoscaled amorphous Si and SiNx layers on the atomic oxygen resistant property of Ag film were investigated. The results show that nanoscaled Si or SiNx protective layer can provide better protection to Ag film against oxidation caused by AO irradiation. The silica layer formed on the surface of amorphous protective layers during AO exposure process plays the key role in protecting Ag film from oxidation. On the other hand, the tribological performance of Ag film and the multilayer films was comparatively studied using a ball-on-disc tribometer in vacuum condition. The tribotest results indicate that Ag/Si and Ag/SiNx films show the better lubricating performance before and after AO irradiation than pure Ag film. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000302135700025 |
| 公开日期 | 2013-07-12 |
| 源URL | [http://210.77.64.217/handle/362003/3295]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 兰州化学物理研究所_先进润滑与防护材料研究发展中心 |
| 通讯作者 | Liu WM(刘维民) |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Hu M,Gao XM,Sun JY,et al. The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film[J]. Applied Surface Science,2012,258(15):5683-5688. |
| APA | Hu M.,Gao XM.,Sun JY.,Weng LJ.,Zhou F.,...&刘维民.(2012).The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film.Applied Surface Science,258(15),5683-5688. |
| MLA | Hu M,et al."The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film".Applied Surface Science 258.15(2012):5683-5688. |
入库方式： OAI收割
来源：兰州化学物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。