Optical microswitch having electrostatic microactuator and method for use thereof
文献类型：专利
| 作者 | JERMAN, JOHN, H.; GRADE, JOHN, D.; DRAKE, JOSEPH, D. |
| 发表日期 | 1999-07-22 |
| 专利号 | WO1999037013A1 |
| 著作权人 | SEAGATE TECHNOLOGY, INC. |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical microswitch having electrostatic microactuator and method for use thereof |
| 英文摘要 | An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180a, 180b) are carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors. |
| 公开日期 | 1999-07-22 |
| 申请日期 | 1999-01-12 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/52178]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SEAGATE TECHNOLOGY, INC. |
| 推荐引用方式 GB/T 7714 | JERMAN, JOHN, H.,GRADE, JOHN, D.,DRAKE, JOSEPH, D.. Optical microswitch having electrostatic microactuator and method for use thereof. WO1999037013A1. 1999-07-22. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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