Micromachined torsional mirror unit for optical switching and fabrication method therefor
文献类型：专利
| 作者 | DE ROOIJ, NICOLAAS F.; NOELL, WILFRIED; SHAN, XUECHUAN; WANG, ZHENFENG; WANG, ZHIPING |
| 发表日期 | 2003-10-27 |
| 专利号 | AU2002251666A1 |
| 著作权人 | SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY |
| 国家 | 澳大利亚 |
| 文献子类 | 发明申请 |
| 其他题名 | Micromachined torsional mirror unit for optical switching and fabrication method therefor |
| 英文摘要 | An optical switch (402) formed on a substrate and a fabrication method therefor are disclosed. The optical switch (402) comprises a mirror (404) disposed substantially upright in relation to a substrate (414), the mirror (404) being rotatably displaceable about a pivot between a first position and a position angularly displaced from the first position. The optical switch also comprises a comb drive actuator, which includes a stationary comb (408) anchored to the substrate in a position substantially parallel to the plane of the substrate (414), and a displaceable comb (406) interleaved with the stationary comb (408) and coupled to the mirror (404) in a position substantially coplanar with the stationary comb (408) and substantially perpendicular to the plane of the mirror (404). In the optical switch (402), the stationary and displaceable combs (408, 406) are capable of applying a force for rotatably displacing the mirror (404) to one of the first position and position angularly displaced from the first position. |
| 公开日期 | 2003-10-27 |
| 申请日期 | 2002-03-30 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/52687]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY |
| 推荐引用方式 GB/T 7714 | DE ROOIJ, NICOLAAS F.,NOELL, WILFRIED,SHAN, XUECHUAN,et al. Micromachined torsional mirror unit for optical switching and fabrication method therefor. AU2002251666A1. 2003-10-27. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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