Standoffs for passive alignment of semiconductor chip and coupling bench
文献类型：专利
| 作者 | LIM, HWI; CHA CHER LIANG RANDALL; LAM, YEE; TEO KIAN HIN VICTOR; LIM HWI SIONG; LAM YEE LOY |
| 发表日期 | 2003-12-31 |
| 专利号 | WO2003048823A3 |
| 著作权人 | DENSELIGHT SEMICONDUCTORS PTE LTD |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Standoffs for passive alignment of semiconductor chip and coupling bench |
| 英文摘要 | Disclosed is a method for forming a first optical device (128) and a vertical stand-off (126) on adjacent regions of a substrate. The method comprises the steps of: depositing subsequent layers of optical materials on the substrate and defining features of the optical device by masking and etching regions of at least one layer; defining the transverse extent of the stand-off by protectively masking a separate region of the or each layer that is etched; modifying the relative thickness of an upper section of the stand-off and the first optical device so that a second optical device (200) subsequently supported by the stand-off is in close optical alignment with the first optical device; and etching a trench through one or more layers of material between the vertical stand-off and the first optical device. Also disclosed is an optical assembly comprising a first optical device and at least one vertical stand-off formed on adjacent regions of a substrate. |
| 公开日期 | 2003-12-31 |
| 申请日期 | 2002-11-25 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/52916]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | DENSELIGHT SEMICONDUCTORS PTE LTD |
| 推荐引用方式 GB/T 7714 | LIM, HWI,CHA CHER LIANG RANDALL,LAM, YEE,et al. Standoffs for passive alignment of semiconductor chip and coupling bench. WO2003048823A3. 2003-12-31. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。