Optical waveguide device, manufacturing method thereof, and optical communication apparatus
文献类型：专利
| 作者 | HAYAMIZU, KAZUYUKI; KOMURA, YOSHIYUKI; TERAKAWA, YUKARI; HOSOKAWA, HAYAMI; TAKAHASHI, TOSHIYUKI; HIGUCHI, MASAYOSHI; TATARA, YOSHITAKA; YASUDA, NARU; NOZAWA, HIROTO |
| 发表日期 | 2005-02-16 |
| 专利号 | EP1378777A3 |
| 著作权人 | OMRON CORPORATION |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Optical waveguide device, manufacturing method thereof, and optical communication apparatus |
| 英文摘要 | A method of manufacturing an optical waveguide device (14a) includes providing an optical fiber guide (23a) for fixing an optical fiber and providing optical element placing portions (24a,24b) for element mounting benches (33a,33b) outside a waveguide fixing region (30) of a silicon substrate (16). A metallic thin film (21) is formed outside the waveguide fixing region of the silicon substrate (16). After an optical waveguide substrate (15) is bonded to a whole of an upper surface of the silicon substrate (16) through a bonding resin which will become an upper cladding layer (20), the optical waveguide substrate (15) is diced along an edge of the waveguide fixing region (30), and the optical waveguide substrate outside the waveguide fixing region (30) is removed to expose the optical fiber guide (23a) and the optical element placing portions (24a,24b). |
| 公开日期 | 2005-02-16 |
| 申请日期 | 2003-07-01 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/53070]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | OMRON CORPORATION |
| 推荐引用方式 GB/T 7714 | HAYAMIZU, KAZUYUKI,KOMURA, YOSHIYUKI,TERAKAWA, YUKARI,et al. Optical waveguide device, manufacturing method thereof, and optical communication apparatus. EP1378777A3. 2005-02-16. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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