Structure Comprising An Adiabatic Coupler For Adiabatic Coupling Of Light Between Two Optical Waveguides And Method For Manufacturing Such A Structure
文献类型：专利
| 作者 | AALTO, TIMO |
| 发表日期 | 2007-12-13 |
| 专利号 | US20070286552A1 |
| 著作权人 | VALTION TEKNILLINEN TUTKIMUSKESKUS |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Structure Comprising An Adiabatic Coupler For Adiabatic Coupling Of Light Between Two Optical Waveguides And Method For Manufacturing Such A Structure |
| 英文摘要 | A structure comprises an inner strip waveguide (1) and an outer rib waveguide (2) on a common substrate. The thicker inner waveguide (1) is patterned into an inner core layer (3). The thinner outer waveguide (2) is patterned into an outer core layer (4). The inner and outer waveguides are separated by a gap (5) being less than 500 nm. The structure forms an adiabatic coupler. In the method, the first (inner) waveguide (1) is patterned into the thicker inner core layer (3) by etching trenches (8). A thinner outer silicon layer (4) is attached on top of the inner-core layer (3) and the first waveguide (1) to form an outer core layer (4). The second (outer) waveguide (2) is patterned into the outer core layer (4). |
| 公开日期 | 2007-12-13 |
| 申请日期 | 2004-05-18 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/53335]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | VALTION TEKNILLINEN TUTKIMUSKESKUS |
| 推荐引用方式 GB/T 7714 | AALTO, TIMO. Structure Comprising An Adiabatic Coupler For Adiabatic Coupling Of Light Between Two Optical Waveguides And Method For Manufacturing Such A Structure. US20070286552A1. 2007-12-13. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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