Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film
文献类型：期刊论文
| 作者 | Pang HF(庞华峰)1,2; Zhang GA(张广安)3 ; Tang YL(唐永亮)1; Fu YQ(付永庆)2; Wang LP(王立平)3; Zu XT(祖小涛)1; Frank Placido2
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| 刊名 | Applied Surface Science
 |
| 出版日期 | 2012 |
| 卷号 | 259页码:747-753 |
| 关键词 | Sputtered ZnO film Substrate tilt angle Band-gap energy Photoluminescence New one-step method |
| ISSN号 | 0169-4332 |
| 通讯作者 | 付永庆 ; 祖小涛 |
| 英文摘要 | A new one-step method utilizing a special holder for a direct current magnetron sputtering system has enabled simultaneous deposition of ZnO films with different substrate tilt angles on quartz and silicon substrates. Observation from scanning electron microscopy shows that a typical columnar structure is obtained and the column inclination angle varies from 0◦to 34◦. From X-ray diffraction analysis, the strains in the ZnO films decrease with increasing substrate tilt angle, which is confirmed by the variation of the longitude optical phonon vibration in the Raman spectra. The band-gap energies decrease from 3.19 eV to 3.07 eV mainly due to the changes of strain relaxation induced by the defect variations in the films. Photoluminescence spectra revealed that the generation, type and concentration of the complex defects are influenced by the substrate tilt angle. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the Fundamental Research Fundsfor the Central Universities (ZYGX2009J046;ZYGX2009X007);the Sichuan Young Scientists Foundation (2010JQ0006);the Royal Society-Research Grant (RG090609);Carnegie Trust Funding, RoyalSociety of Edinburgh;Royal Academy of Engineering-Research Exchanges with China and India Awards |
| 语种 | 英语 |
| WOS记录号 | WOS:000310436900112 |
| 公开日期 | 2013-07-12 |
| 源URL | [http://210.77.64.217/handle/362003/3292]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.Univ Elect Sci & Technol China, Dept Appl Phys, Chengdu 610054, Peoples R China 2.Univ W Scotland, SUPA, Thin Film Ctr, Paisley PA1 2BE, Renfrew, Scotland 3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang HF,Zhang GA,Tang YL,et al. Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film[J]. Applied Surface Science,2012,259:747-753. |
| APA | Pang HF.,Zhang GA.,Tang YL.,Fu YQ.,Wang LP.,...&Frank Placido.(2012).Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film.Applied Surface Science,259,747-753. |
| MLA | Pang HF,et al."Substrate-tilt angle effect on structural and optical properties of sputtered ZnO film".Applied Surface Science 259(2012):747-753. |
入库方式： OAI收割
来源：兰州化学物理研究所
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