Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique
文献类型：期刊论文
| 作者 | Cui JF(崔金凤)1; Qiang L(强力)1,2 ; Zhang B(张斌)2; Ling X(凌萧)1,2; Yang T(杨涛)1,2; Zhang JY(张俊彦)2; Zhang B; Qiang L
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| 刊名 | Applied Surface Science
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| 出版日期 | 2012 |
| 卷号 | 258期号:12页码:5025-5030 |
| 关键词 | Diamond-like carbon film Different concentration Ti doping Low concentration Ti doping Mechanical properties Tribological performance |
| ISSN号 | 0169-4332 |
| 通讯作者 | 张俊彦 |
| 英文摘要 | Ti-doped diamond-like carbon (DLC) films were deposited on Si substrates at room temperature by magnetron sputtering Ti twin-target in methane and argon mixture atmosphere. The DLC films with different Ti concentrations were fabricated by varying the gas flow ratio of Ar/CH4. X-ray photoelectron spectroscopy (XPS), Raman spectra were used to analyze the composition and the microstructure of the films. The internal stress was calculated by using the Stoney equation, where the curvature of the film/substrate was measured by BGS 6341 type film stress tester. The mechanical and tribological properties of the films were systematically studied by the nano-indentor and reciprocating ball-on-disc tester, respectively. The Ti atomic concentration in the films increased from 0.41% to 8.2% as the Ar/CH4 flow ratio increased from 60/190 to 140/110. The Ti atoms exist mainly in the form of metallic-like Ti rather than TiC when Ti concentration is 0.41%, confirmed by XPS analysis. As the Ti concentration rose to 6.7%, the Ti-DLC films transformed to composite DLC films with carbide phase embedded in the DLC matrix because of the formation of TiC. As a result, the hardness is decreased, while the stress is dramatically increased. The Ti-DLC films with 0.41% Ti doping showed a relatively high hardness (13.75 GPa), low stress (0.56 GPa), extremely low wear rate (∼10−10 mm3/Nm) and low friction coefficient (0.05). |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (grant no. 50823008;50975273);the Ministry of Science and Technology of China (grant no. 2010DFA63610) |
| 语种 | 英语 |
| WOS记录号 | WOS:000301002600005 |
| 公开日期 | 2013-07-12 |
| 源URL | [http://210.77.64.217/handle/362003/3305]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Lanzhou Univ Technol, Sch Petr Chem Engn, Lanzhou 730050, Peoples R China |
| 推荐引用方式 GB/T 7714 | Cui JF,Qiang L,Zhang B,et al. Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique[J]. Applied Surface Science,2012,258(12):5025-5030. |
| APA | Cui JF.,Qiang L.,Zhang B.,Ling X.,Yang T.,...&Qiang L.(2012).Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique.Applied Surface Science,258(12),5025-5030. |
| MLA | Cui JF,et al."Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique".Applied Surface Science 258.12(2012):5025-5030. |
入库方式： OAI收割
来源：兰州化学物理研究所
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