Optical module mounted WDM filter
文献类型:专利
作者 | HATA, SHOHEI; MATSUSHIMA, NAOKI; TAKAI, TOSHIAKI; SAKIGAWA, YUKIO; SATOSHI, ARAI |
发表日期 | 2010-01-06 |
专利号 | EP2141526A1 |
著作权人 | HITACHI LTD. |
国家 | 欧洲专利局 |
文献子类 | 发明申请 |
其他题名 | Optical module mounted WDM filter |
英文摘要 | A filter element includes a first glass substrate (1) having a pair of parallel surfaces and a band pass filter (4, 6) arranged on one of the parallel surfaces, a pair of single-crystal substrates (Si wafers) (2, 3) each including a primary surface formed with a depression (20, 30) having an inclined surface (21, 31) with respect to the primary surface occupying at least one half of the opening of the depression (21, 31), and a second glass substrate (25) having an optical element. The primary surfaces of the single-crystal substrate pair (2, 3) are bonded to a pair of the surfaces of the glass substrate (1). The depressions (20, 30) are faced through the glass substrate (1) and surround the band pass filter (4, 6). By this configuration, the filter element can be mass produced with a high accuracy and a low cost by the wafer-level process. |
公开日期 | 2010-01-06 |
申请日期 | 2009-07-02 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/54093] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | HITACHI LTD. |
推荐引用方式 GB/T 7714 | HATA, SHOHEI,MATSUSHIMA, NAOKI,TAKAI, TOSHIAKI,et al. Optical module mounted WDM filter. EP2141526A1. 2010-01-06. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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