Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system
文献类型：专利
| 作者 | NAKAGAWA, SHIGERU; NUMATA, HIDETOSHI; SUEOKA, KUNIAKI; TAIRA, YOICHI |
| 发表日期 | 2012-10-25 |
| 专利号 | US20120267338A1 |
| 著作权人 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system |
| 英文摘要 | An optical coupling structure that interfaces between optical devices mounted on a substrate and optical waveguides formed in the substrate. A manufacturing method includes preparing a wafer formed on an inorganic solid material on a dicing tape and cutting the back surface of the wafer to form substantially angled portions using a dicing blade having a point angle. The dicing tape is stripped from the wafer and the wafer is separated at the valleys between the substantially angled portions to obtain an optical coupling element. The obtained optical coupling element is a three-dimensional polyhedral light-reflecting member having a mirror surface corresponding to a surface of the wafer. The obtained optical coupling element is inserted into a trench that opens, substantially perpendicular to an optical waveguide of an optical transmission substrate, in the main surface of the optical transmission substrate to provide a structure for optical coupling with the outside. |
| 公开日期 | 2012-10-25 |
| 申请日期 | 2012-06-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54349]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 推荐引用方式 GB/T 7714 | NAKAGAWA, SHIGERU,NUMATA, HIDETOSHI,SUEOKA, KUNIAKI,et al. Method for manufacturing optical coupling element, optical transmission substrate, optical coupling component, coupling method, and optical interconnect system. US20120267338A1. 2012-10-25. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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