Structures formed using monocrystalline silicon and/or other materials for optical and other applications
文献类型：专利
| 作者 | KOSENKO, VALENTIN; MCBAIN, EDWARD LEE; UZOH, CYPRIAN EMEKA; MONADGEMI, PEZHMAN; SAVASTIOUK, SERGEY |
| 发表日期 | 2013-09-26 |
| 专利号 | WO2013106285A3 |
| 著作权人 | INVENSAS CORPORATION |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Structures formed using monocrystalline silicon and/or other materials for optical and other applications |
| 英文摘要 | An interposer includes grooves (310) for waveguides 104 (e.g. optical fiber cables) coupled to a transducer (120). The grooves are formed by etching a cavity (410) in a substrate (130), filling the cavity with some layer (520), then etching the layer to form the grooves. The grooves can be formed in a separate structure which is then inserted into a cavity in an interposer having electrical circuitry for the transducer. The cavity has outwardly or inwardly sloped sidewalls which can serve as mirrors (144) or on which the mirrors are later formed. The substrate can be monocrystalline silicon, in which the inwardly sloped (retrograde) sidewalls are formed by a combination of different etches at least one of which is selective to certain crystal planes. Other features, including non-optical embodiments, are also provided. |
| 公开日期 | 2013-09-26 |
| 申请日期 | 2013-01-07 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54403]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INVENSAS CORPORATION |
| 推荐引用方式 GB/T 7714 | KOSENKO, VALENTIN,MCBAIN, EDWARD LEE,UZOH, CYPRIAN EMEKA,et al. Structures formed using monocrystalline silicon and/or other materials for optical and other applications. WO2013106285A3. 2013-09-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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