中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Light coupling formation in a waveguide layer

文献类型:专利

作者TSENG, CHUN-HAO; KUO, YING-HAO; YEE, KUO-CHUNG
发表日期2015-05-14
专利号US20150131938A1
著作权人TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
国家美国
文献子类发明申请
其他题名Light coupling formation in a waveguide layer
英文摘要An approach is provided for forming a light coupling in a waveguide layer. The approach involves forming a waveguide layer overlaying an upper surface of a substrate. The approach also involves placing a chip package portion within the waveguide layer in a selected position. The approach further involves forming a molding compound layer overlaying the waveguide layer and the chip package portion. The approach additionally involves curing the molding compound layer to form a cured package. The approach also involves releasing the cured package from the substrate and inverting the cured package. The approach further involves forming a ridge waveguide structure in the waveguide layer by removing a portion of the lower surface of the cured package.
公开日期2015-05-14
申请日期2013-11-08
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/54461]  
专题半导体激光器专利数据库
作者单位TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
推荐引用方式
GB/T 7714
TSENG, CHUN-HAO,KUO, YING-HAO,YEE, KUO-CHUNG. Light coupling formation in a waveguide layer. US20150131938A1. 2015-05-14.

入库方式: OAI收割

来源:西安光学精密机械研究所

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