Optically aligned hybrid semiconductor device and method
文献类型：专利
| 作者 | KINGHORN, DAVID, HENRY; NOVACK, ARI, JASON; KLEIN, HOLGER, N.; NUTTALL, NATHAN, A.; DESAI, KISHOR, V.; BLUMENTHAL, DANIEL, J.; HOCHBERG, MICHAEL, J.; SHI, RUIZHI |
| 发表日期 | 2016-10-06 |
| 专利号 | WO2016161150A1 |
| 著作权人 | CORIANT ADVANCED TECHNOLOGY, LLC |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Optically aligned hybrid semiconductor device and method |
| 英文摘要 | Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at precisely-defined complementary vertical offsets from optical axes of the corresponding waveguides, so that the waveguides are vertically aligned when one of the chips is placed atop the other with their alignment surface abutting each other. The position of the at least one of the alignment surface in a layer stack of its chip is precisely defined by epitaxy. The chips are bonded at offset bonding pads with the alignment surfaces abutting in the absence of bonding material therebetween. |
| 公开日期 | 2016-10-06 |
| 申请日期 | 2016-03-31 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54680]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CORIANT ADVANCED TECHNOLOGY, LLC |
| 推荐引用方式 GB/T 7714 | KINGHORN, DAVID, HENRY,NOVACK, ARI, JASON,KLEIN, HOLGER, N.,et al. Optically aligned hybrid semiconductor device and method. WO2016161150A1. 2016-10-06. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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