Methods of fabricating photosensitive substrates suitable for optical coupler
文献类型：专利
| 作者 | FLEMMING, JEB H.; BULLINGTON, JEFF A.; CHENOWETH, LUIS C.; COOK, ROGER |
| 发表日期 | 2019-05-30 |
| 专利号 | US20190161389A1 |
| 著作权人 | 3D GLASS SOLUTIONS, INC. |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Methods of fabricating photosensitive substrates suitable for optical coupler |
| 英文摘要 | The present invention provides a method to fabricate an optical coupler comprising the steps of: preparing a photosensitive glass substrate comprising at least silica, lithium oxide, aluminum oxide, and cerium oxide; masking a halftone design with variation in optical density to delineate an optical element in the glass; exposing the photosensitive glass substrate to an activating energy source; exposing the photosensitive glass substrate to a heating phase of at least ten minutes above its glass transition temperature; cooling the photosensitive glass substrate to transform at least part of the exposed glass to a crystalline material to form a glass-crystalline substrate; and etching the glass-crystalline substrate with an etchant solution to form the one or more optical elements. |
| 公开日期 | 2019-05-30 |
| 申请日期 | 2017-04-07 |
| 状态 | 申请中 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/54779]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | 3D GLASS SOLUTIONS, INC. |
| 推荐引用方式 GB/T 7714 | FLEMMING, JEB H.,BULLINGTON, JEFF A.,CHENOWETH, LUIS C.,et al. Methods of fabricating photosensitive substrates suitable for optical coupler. US20190161389A1. 2019-05-30. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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